Diffusion Pump Hints and Instructions
Diffusion pumps should start
operating at roughly 200 micron and should not be used at pressures exceeding that for
fear of drawing the diffusion pump oil into the mechanical backing/roughing pump. We will
be publishing more over time and as we assemble more information.
11/27/2005 ęCopyright HyVac Products,
Inc. All Right Reserved
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